Telluride Workshop on Semiconductor Surface Chemistry

Telluride Workshop on Semiconductor Surface Chemistry

July 29 – August 2, 2002

Monday

9 AM Silicon Etching and Growth (170)

Melissa Hines (75 minutes) – Silicon etching and chemical control of nanomechanical properties

Break

John Ekerdt (50 minutes) – Silicon Growth: Nanoparticles on dielectrics, and hut clusters

Break

Greg Parsons (25 minutes) – Low temperature silicon plasma deposition: Mechanisms and roughness evolution in thin film growth

Doug Doren (20 minutes) – Surface excited states and nonadiabatic reaction mechanisms

7 PM Molecular Electronics (170)

Greg Parsons (25 minutes) – Engineering Challenges

Greg Lopinski (75 minutes) – Electronic Properties and transport at chemically modified surfaces

Break

Eric Borguet (25 minutes) – Hot Electrons, Charge Transfer and Trapping in Chemically Modified Semiconductor Surfaces

Eric Garfunkel (15 minutes) – Interface issues in molecular electronics

Doug Doren (30 minutes) – Cycloaddition Reactions on Si, Ge and Diamond

Tuesday

Organic Monolayers and Reactions of Organics

8:45 AM Mostly in air and under solution (175)

Jillian Buriak (75 minutes) -- Reactions on H-terminated surfaces

Break

Matt Linford (75 minutes) – Chemo-Mechanical Patterning

Eric Borguet (25 minutes) – Photochemistry of SAMs on silica

7 PM Mostly in UHV (175)

Stacey Bent (50 minutes) – Organic functionalization on Si and Ge

Mike Schwartz (30 minutes) – Nitrogen-containing organic molecules on Si

Break

Sean Casey (50 minutes) – Alcohols and Amines on Si

Andrew Teplyakov (45 minutes) – Ethyl-containing compounds on Si

and Cyclization on Alloys

Wednesday

No Morning Session

7 PM Oxides and Oxidation on Silicon and Silicon on Oxides

Various oxides (160)

Krishnan Raghavachari (30 minutes) – Oxidation and ALD

John Crowell (40 minutes) – Surface & Gas Phase Reactions in Dielectric Thin Film Deposition

Break

Eric Borguet (25 minutes) – Nonlinear Optical Response and Stability of Chemistry of Si and Ge

Doug Doren (15 minutes) – Oxidation of Si and Ge

James Engstrom (50 minutes) – Promoting selective area growth on Si-SiO₂ with atomic hydrogen and Growth of poly-Si on (Ca-Al-Si)-oxide glasses

Thursday

8:45 AM Oxides and Oxidation on Silicon and Silicon on Oxides (continued)

Mostly High-k (175)

Eric Garfunkel (60 minutes) – High-k dielectrics

Greg Parsons (25 minutes) – Interface reactions in high-k deposition

Break

Charles Musgrave (75 minutes) – ALD and CVD of high-k materials

Doug Doren (15 minutes) – Oxynitrides on Si and Diamond

2 PM Metal Growth and Etching (110)

Andrew Teplyakov (30 minutes) – Al deposition and TiN

James Engstrom (25 minutes) – Nucleation and growth of Cu on TiN and TaN barrier layers

John Ekerdt (25 minutes) – Ta ALD

Andy Kummel (30 minutes) – Halogen etching of aluminum

5 PM Barbeque

8 PM Public Talk, Wilkenson Public Library

Melissa A. Hines and Greg Lopinski

"Nanomechanics and Molecular Electronics: New Technologies from Very Small Objects"

Friday

8:45 AM Everything Else (180)
Chemistry on III-V’s

Krishnan Raghavachari (45 minutes) – Chemistry of hydrogenated III-V surfaces and ALD growth mechanisms

Andy Kummel (45 minutes) – Oxidation and Oxide Deposition on GaAs

Break

Biological Applications

John Crowell (35 minutes) – Desorption/Ionization on Porous Silicon Mass Spectrometry

Mike Schwartz (30 minutes) – Photochemical attachment of biological molecules to diamond and silicon

Stacey Bent (25 minutes) – Microcontact printing/surface modification for biological applications