Workshop on Semiconductor Surface Chemistry
Telluride, Colorado
August 9-14, 1998
Schedule
Monday 9 AM-Noon
Reactions of Organics
Doren (30) Bent (75) Hamers
(60)
Monday 7-10PM
Oxidation, Oxides, Oxynitrides and other Dielectric Materials
Raghavachari (75) Garfunkel (75)
Tuesday 9 AM-Noon
Reactions of Organics
Wayner (75) Lopinski (75) Doren (30)
Tuesday 2-5 PM
Dopants & Alloys
Ekerdt (75)
Dopants & Chlorine
Musgrave (75)
Tuesday 7-10 PM
Oxidation, Oxides, Oxynitrides and other Dielectric Materials
Queeney (45) Parsons (45)
Deposition, Growth and Crystallization
Parsons (30) Engstrom (50)
Wednesday 8-11 PM
Reactions of Organics
Greenlief (40)
Hydrogen Adsorption, Desorption and Diffusion
Boland (75) Doren (30)
Thursday 9 AM-Noon
Effects of Dopants and Alloys on Reactivity
Hamers (15) Crowell (75) Engstrom (25) Doren
(15)
Friday 8:30 AM-Noon
Reactions of Radicals
Jasinski (45)
Passivation
Greenlief (35)
Reactions of Chlorine
Yates (75), Boland (15)